@misc{indiciaebb231c99f067,
  title = {Wafer Defect Root Cause Analysis with Partial Trajectory Regression},
  author = {Kohei Miyaguchi and Masao Joko and Rebekah Sheraw and Tsuyoshi Idé},
  year = {2025},
  doi = {10.1109/asmc64512.2025.11010733},
  url = {https://arxiv.org/abs/2507.20357},
  note = {Source identifier: 2507.20357}
}