TY  - RPRT
TI  - Wafer Defect Root Cause Analysis with Partial Trajectory Regression
AU  - Kohei Miyaguchi
AU  - Masao Joko
AU  - Rebekah Sheraw
AU  - Tsuyoshi Idé
PY  - 2025
DO  - 10.1109/asmc64512.2025.11010733
UR  - https://arxiv.org/abs/2507.20357
ID  - 2507.20357
ER  -