@misc{indiciaed2abd1c6e3ed, title = {Phase Competition and Rutile Phase Stabilization of Growing GeO2 Films by MOCVD}, author = {Imteaz Rahaman and Botong Li and Hunter D. Ellis and Kathy Anderson and Feng Liu and Michael A. Scarpulla and Kai Fu}, year = {2025}, url = {https://arxiv.org/abs/2507.22430}, note = {Source identifier: 2507.22430} }