TY - RPRT TI - Phase Competition and Rutile Phase Stabilization of Growing GeO2 Films by MOCVD AU - Imteaz Rahaman AU - Botong Li AU - Hunter D. Ellis AU - Kathy Anderson AU - Feng Liu AU - Michael A. Scarpulla AU - Kai Fu PY - 2025 UR - https://arxiv.org/abs/2507.22430 ID - 2507.22430 ER -