@misc{indiciae4acda2a7b60b,
  title = {High-quality Blazed Gratings through Synergy between E-Beam lithography and Robust Characterisation Techniques},
  author = {Analía F. Herrero and Nazanin Samadi and Andrey Sokolov and Grzegorz Gwalt and Stefan Rehbein and Anke Teichert and Bas Ketelaars and Christian Zonnevylle and Thomas Krist and Christian David and Frank Siewert},
  year = {2025},
  url = {https://arxiv.org/abs/2507.22697},
  note = {Source identifier: 2507.22697}
}