@misc{indiciaea3a20681e567,
  title = {Mechanistic Insight into BEOL Thermal Transport via Optical Metrology and Multiphysics Simulation},
  author = {Yang Shen and Shangzhi Song and Tao Chen and Kexin Zhang and Yu Chen and Lu Zhao and Puqing Jiang},
  year = {2025},
  url = {https://arxiv.org/abs/2508.07740},
  note = {Source identifier: 2508.07740}
}