TY  - RPRT
TI  - Mechanistic Insight into BEOL Thermal Transport via Optical Metrology and Multiphysics Simulation
AU  - Yang Shen
AU  - Shangzhi Song
AU  - Tao Chen
AU  - Kexin Zhang
AU  - Yu Chen
AU  - Lu Zhao
AU  - Puqing Jiang
PY  - 2025
UR  - https://arxiv.org/abs/2508.07740
ID  - 2508.07740
ER  -