@misc{indiciaef4c706170372, title = {High-\$Q\$ superconducting resonators fabricated in an industry-scale semiconductor-fabrication facility}, author = {Nicolas Arlt and Karina Houska and Jochen Braumüller and Michael Kirsch and Gerhard Metzger-Brückl and Wolfgang Raberg and Thomas Stangl and Stefan Filipp and Jash Banker and Florian Brandl}, year = {2025}, url = {https://arxiv.org/abs/2508.09577}, note = {Source identifier: 2508.09577} }