@misc{indiciaeb3426a9b51e8,
  title = {Multiphysics Simulation and First Prototype Development of a Microwave Plasma System for Chemical Vapour Deposition (CVD) Applications},
  author = {Akash Akash and Sanjeev Kumar Pandey and Venkata Sai Teja Madana and S. Manikandan and Guhan Gunasekaran and Sundar Ravi and Sethu Narayanana and C. Nikhil and Nishant Sirse and S. Sathyan and N. Arunachalam and M. S Ramachandra Rao},
  year = {2025},
  url = {https://arxiv.org/abs/2508.10459},
  note = {Source identifier: 2508.10459}
}