@misc{indiciaea8c5a32a1ede,
  title = {Fabrication, characterization and mechanical loading of Si/SiGe membranes for spin qubit devices},
  author = {Lucas Marcogliese and Ouviyan Sabapathy and Rudolf Richter and Jhih-Sian Tu and Dominique Bougeard and Lars R. Schreiber},
  year = {2026},
  doi = {10.1103/rw7k-pcvw},
  url = {https://arxiv.org/abs/2508.14589},
  note = {Source identifier: 2508.14589}
}