TY  - RPRT
TI  - Fabrication, characterization and mechanical loading of Si/SiGe membranes for spin qubit devices
AU  - Lucas Marcogliese
AU  - Ouviyan Sabapathy
AU  - Rudolf Richter
AU  - Jhih-Sian Tu
AU  - Dominique Bougeard
AU  - Lars R. Schreiber
PY  - 2026
DO  - 10.1103/rw7k-pcvw
UR  - https://arxiv.org/abs/2508.14589
ID  - 2508.14589
ER  -