@misc{indiciaecd38d0bed5cb,
  title = {Compressed Learning for Nanosurface Deficiency Recognition Using Angle-resolved Scatterometry Data},
  author = {Mehdi Abdollahpour and Carsten Bockelmann and Tajim Md Hasibur Rahman and Armin Dekorsy and Andreas Fischer},
  year = {2025},
  url = {https://arxiv.org/abs/2508.17873},
  note = {Source identifier: 2508.17873}
}