TY  - RPRT
TI  - Compressed Learning for Nanosurface Deficiency Recognition Using Angle-resolved Scatterometry Data
AU  - Mehdi Abdollahpour
AU  - Carsten Bockelmann
AU  - Tajim Md Hasibur Rahman
AU  - Armin Dekorsy
AU  - Andreas Fischer
PY  - 2025
UR  - https://arxiv.org/abs/2508.17873
ID  - 2508.17873
ER  -