@misc{indiciae6159f148a2a2, title = {Design Optimized CMOS Compatible Hybrid Silicon MIM Waveguide Cavity for Label Free Sensing}, author = {Alireza Khalilian and Hima Nikafshan Rad}, year = {2025}, url = {https://arxiv.org/abs/2508.18291}, note = {Source identifier: 2508.18291} }