@misc{indiciaecd26cbf0b85c,
  title = {Low Loss Aluminum Nitride Waveguide Fabrication: Propagation Loss Reduction Through ALD and RTA},
  author = {Nikolay Videnov and Matthew L. Day and Michal Bajcsy},
  year = {2025},
  url = {https://arxiv.org/abs/2508.20245},
  note = {Source identifier: 2508.20245}
}