TY  - RPRT
TI  - Low Loss Aluminum Nitride Waveguide Fabrication: Propagation Loss Reduction Through ALD and RTA
AU  - Nikolay Videnov
AU  - Matthew L. Day
AU  - Michal Bajcsy
PY  - 2025
UR  - https://arxiv.org/abs/2508.20245
ID  - 2508.20245
ER  -