@misc{indiciae810169606747, title = {MEMS Vapor Cells-based Rydberg-atom Electrometry Toward Miniaturization and High Sensitivity}, author = {Yintao Ma and Beibei Sun and Pan Chen and Yao Chen and Yanbin Wang and Ju Guo and Mingzhi Yu and Ping Yang and Qijing Lina and Libo Zhao}, year = {2025}, url = {https://arxiv.org/abs/2509.01911}, note = {Source identifier: 2509.01911} }