@misc{indiciaea5bcfeb4f9d6,
  title = {High-\$Q\$ membrane resonators using ultra-high-stress crystalline TiN films},
  author = {Yuki Matsuyama and Shotaro Shirai and Ippei Nakamura and Masao Tokunari and Hirotaka Terai and Yuji Hishida and Ryo Sasaki and Yusuke Tominaga and Atsushi Noguchi},
  year = {2025},
  doi = {10.1063/5.0300550},
  url = {https://arxiv.org/abs/2509.02987},
  note = {Source identifier: 2509.02987}
}