@misc{indiciae4750c51d8d56,
  title = {Pressure dependence of magnetron sputtering: 2D-RZ particle-in-cell and 1D fluid modeling},
  author = {Joseph G. Theis and Gregory R. Werner and Thomas G. Jenkins and Daniel Main and John R. Cary},
  year = {2026},
  doi = {10.1063/5.0300678},
  url = {https://arxiv.org/abs/2509.03664},
  note = {Source identifier: 2509.03664}
}