TY  - RPRT
TI  - Pressure dependence of magnetron sputtering: 2D-RZ particle-in-cell and 1D fluid modeling
AU  - Joseph G. Theis
AU  - Gregory R. Werner
AU  - Thomas G. Jenkins
AU  - Daniel Main
AU  - John R. Cary
PY  - 2026
DO  - 10.1063/5.0300678
UR  - https://arxiv.org/abs/2509.03664
ID  - 2509.03664
ER  -