@misc{indiciae2c49bf63de16,
  title = {Investigation of tantalum films growth for coplanar resonators with internal quality factors above ten million},
  author = {E. V. Zikiy and N. S. Smirnov and E. A. Krivko and A. R. Matanin and A. I. Ivanov and E. I. Malevannaya and V. I. Polozov and S. V. Bukatin and D. A. Baklykov and I. A. Stepanov and S. A. Kotenkov and S. P. Bychkov and D. A. Fokin and I. A. Ryzhikov and A. V. Andriyash and I. A. Rodionov},
  year = {2026},
  doi = {10.1063/5.0308010},
  url = {https://arxiv.org/abs/2509.04917},
  note = {Source identifier: 2509.04917}
}