@misc{indiciae4ae49d4c3f35,
  title = {Depth Profiling of Oxygen Migration in Ta/HfO2 Stacks During Ionic Liquid Gating},
  author = {Beatrice Bednarz and Martin Wortmann and Olga Kuschel and Fabian Kammerbauer and Mathias Kläui and Andreas Hütten and Joachim Wollschläger and Gerhard Jakob and Timo Kuschel},
  year = {2025},
  doi = {10.1021/acsami.5c22179},
  url = {https://arxiv.org/abs/2509.05748},
  note = {Source identifier: 2509.05748}
}