@misc{indiciae32c8b389dabf,
  title = {Atomic Layer Etching of Aluminum Nitride: Mechanistic Insights from First-Principles Studies of Chlorine Chemistry},
  author = {Sanjay Nayak and Nikolai Andrianov and Thomas Gruhn and Joaquin Miranda},
  year = {2025},
  url = {https://arxiv.org/abs/2509.07554},
  note = {Source identifier: 2509.07554}
}