TY  - RPRT
TI  - Atomic Layer Etching of Aluminum Nitride: Mechanistic Insights from First-Principles Studies of Chlorine Chemistry
AU  - Sanjay Nayak
AU  - Nikolai Andrianov
AU  - Thomas Gruhn
AU  - Joaquin Miranda
PY  - 2025
UR  - https://arxiv.org/abs/2509.07554
ID  - 2509.07554
ER  -