@misc{indiciae5bce56a0467d, title = {Monolithic 3D integration of tantalum pentoxide photonics on arbitrary substrates}, author = {Grant M. Brodnik and Grisha Spektor and Lindell M. Williams and Jizhao Zang and Alexa R. Carollo and Atasi Dan and Jennifer A. Black and David R. Carlson and Scott B. Papp}, year = {2025}, url = {https://arxiv.org/abs/2509.08092}, note = {Source identifier: 2509.08092} }