@misc{indiciaebf3260666f9f, title = {Unsupervised Integrated-Circuit Defect Segmentation via Image-Intrinsic Normality}, author = {Botong Zhao and Qijun Shi and Shujing Lyu and Yue Lu}, year = {2025}, url = {https://arxiv.org/abs/2509.09375}, note = {Source identifier: 2509.09375} }