@misc{indiciae29b6ec190d07,
  title = {Automating Code Generation for Semiconductor Equipment Control from Developer Utterances with LLMs},
  author = {Youngkyoung Kim and Sanghyeok Park and Misoo Kim and Gangho Yoon and Eunseok Lee and Simon S. Woo},
  year = {2025},
  url = {https://arxiv.org/abs/2509.13055},
  note = {Source identifier: 2509.13055}
}