@misc{indiciaef19914490793,
  title = {Delta-Doped Diamond via in-situ Plasma-Distance Control},
  author = {Philip Schätzle and Felix Hoffmann and Sven Mägdefessel and Patrik Straňák and Lutz Kirste and Peter Knittel},
  year = {2026},
  url = {https://arxiv.org/abs/2509.17521},
  note = {Source identifier: 2509.17521}
}