@misc{indiciae3dfe4f6a5fc7, title = {Quality-Ensured In-Situ Process Monitoring with Deep Canonical Correlation Analysis}, author = {Xiaoyang Song and Wenbo Sun and Metin Kayitmazbatir and Jionghua and Jin}, year = {2025}, url = {https://arxiv.org/abs/2509.19652}, note = {Source identifier: 2509.19652} }