TY  - RPRT
TI  - Quality-Ensured In-Situ Process Monitoring with Deep Canonical Correlation Analysis
AU  - Xiaoyang Song
AU  - Wenbo Sun
AU  - Metin Kayitmazbatir
AU  - Jionghua
AU  - Jin
PY  - 2025
UR  - https://arxiv.org/abs/2509.19652
ID  - 2509.19652
ER  -