@misc{indiciaef1956cc49d57,
  title = {Mid-IR Light Modulators Enabled by Dynamically Tunable Ultra High-Q Silicon Membrane Metasurfaces},
  author = {Felix Ulrich Brikh and Aleksei Ezerskii and Olesia Pashina and Nikita Glebov and Wenping Yin and Sergey V. Makarov and Mihail Petrov and Ivan Sinev and Hatice Altug},
  year = {2025},
  url = {https://arxiv.org/abs/2509.23167},
  note = {Source identifier: 2509.23167}
}