@misc{indiciae126df1796aa7,
  title = {LLM Agents for Knowledge Discovery in Atomic Layer Processing},
  author = {Andreas Werbrouck and Marshall B. Lindsay and Matthew Maschmann and Matthias J. Young},
  year = {2026},
  url = {https://arxiv.org/abs/2509.26201},
  note = {Source identifier: 2509.26201}
}