@misc{indiciae8f452a16b63f, title = {Robust NbN on Si-SiGe hybrid superconducting-semiconducting microwave quantum circuit}, author = {Paniz Foshat and Samane Kalhor and Shima Poorgholam-khanjari and Douglas Paul and Martin Weides and Kaveh Delfanazari}, year = {2025}, url = {https://arxiv.org/abs/2509.26363}, note = {Source identifier: 2509.26363} }