TY - RPRT TI - Robust NbN on Si-SiGe hybrid superconducting-semiconducting microwave quantum circuit AU - Paniz Foshat AU - Samane Kalhor AU - Shima Poorgholam-khanjari AU - Douglas Paul AU - Martin Weides AU - Kaveh Delfanazari PY - 2025 UR - https://arxiv.org/abs/2509.26363 ID - 2509.26363 ER -