@misc{indiciae905ea947d6b9, title = {Fully automated inverse co-optimization of templates and block copolymer blending recipes for DSA lithography}, author = {Yuhao Zhou and Huangyan Shen and Qingliang Song and Qingshu Dong and Jianfeng Li and Weihua Li}, year = {2025}, url = {https://arxiv.org/abs/2510.02715}, note = {Source identifier: 2510.02715} }