TY  - RPRT
TI  - Fully automated inverse co-optimization of templates and block copolymer blending recipes for DSA lithography
AU  - Yuhao Zhou
AU  - Huangyan Shen
AU  - Qingliang Song
AU  - Qingshu Dong
AU  - Jianfeng Li
AU  - Weihua Li
PY  - 2025
UR  - https://arxiv.org/abs/2510.02715
ID  - 2510.02715
ER  -