@misc{indiciaea3223b8384a6,
  title = {Finding the temperature window for atomic layer deposition of ruthenium metal via efficient phonon calculations},
  author = {Alexandr Fonari and Simon D. Elliott and Casey N. Brock and Yan Li and Jacob Gavartin and Mathew D. Halls},
  year = {2025},
  doi = {10.1039/d5cp02945g},
  url = {https://arxiv.org/abs/2510.03975},
  note = {Source identifier: 2510.03975}
}