TY  - RPRT
TI  - Finding the temperature window for atomic layer deposition of ruthenium metal via efficient phonon calculations
AU  - Alexandr Fonari
AU  - Simon D. Elliott
AU  - Casey N. Brock
AU  - Yan Li
AU  - Jacob Gavartin
AU  - Mathew D. Halls
PY  - 2025
DO  - 10.1039/d5cp02945g
UR  - https://arxiv.org/abs/2510.03975
ID  - 2510.03975
ER  -