TY  - RPRT
TI  - Deposition rate and energy to substrate in chopped and standard HiPIMS: identifying optimal pulse parameters
AU  - Mina Farahani
AU  - Jiří Čapek
AU  - Tomáš Kozák
PY  - 2025
UR  - https://arxiv.org/abs/2510.05656
ID  - 2510.05656
ER  -