@misc{indiciae625d71a1e1b2, title = {Adaptive Optimizable Gaussian Process Regression Linear Least Squares Regression Filtering Method for SEM Images}, author = {D. Chee Yong Ong and I. Bukhori and K. S. Sim and K. Beng Gan}, year = {2025}, doi = {10.1109/access.2025.3573389}, url = {https://arxiv.org/abs/2510.07895}, note = {Source identifier: 2510.07895} }