@misc{indiciaee89c36feac02,
  title = {Operator-Consistent Physics-Informed Learning for Wafer Thermal Reconstruction in Lithography},
  author = {Ze Tao and Fujun Liu and Yuxi Jin and Ke Xu and Minghui Sun and Xiangsheng Hu and Qi Cao and Haoran Xu and Hanxuan Wang},
  year = {2025},
  url = {https://arxiv.org/abs/2510.09207},
  note = {Source identifier: 2510.09207}
}