@misc{indiciae1baa10ae7643,
  title = {Si3N4 membrane as entrance window for plasma-generated vacuum ultraviolet (VUV) radiation},
  author = {Luka Hansen and Görkem Bilgin and Jan Benedikt},
  year = {2025},
  url = {https://arxiv.org/abs/2510.09524},
  note = {Source identifier: 2510.09524}
}