TY  - RPRT
TI  - Si3N4 membrane as entrance window for plasma-generated vacuum ultraviolet (VUV) radiation
AU  - Luka Hansen
AU  - Görkem Bilgin
AU  - Jan Benedikt
PY  - 2025
UR  - https://arxiv.org/abs/2510.09524
ID  - 2510.09524
ER  -