@misc{indiciaefee7d1ff77ba,
  title = {Metalorganic Chemical Vapor Deposition of AlScN Thin Films and AlScN/AlN/GaN Heterostructures},
  author = {Vijay Gopal Thirupakuzi Vangipuram and Abdul Mukit and Kaitian Zhang and Salva Salmani-Rezaie and Hongping Zhao},
  year = {2025},
  url = {https://arxiv.org/abs/2510.12074},
  note = {Source identifier: 2510.12074}
}