TY  - RPRT
TI  - Design optimization of silicon nitride nanomechanical resonators for thermal infrared detectors: a guide through key figures of merit
AU  - Paolo Martini
AU  - Kostas Kanellopulos
AU  - Silvan Schmid
PY  - 2025
UR  - https://arxiv.org/abs/2510.14758
ID  - 2510.14758
ER  -