@misc{indiciae43b1bea80f1a, title = {Physics-informed data-driven machine health monitoring for two-photon lithography}, author = {Sixian Jia and Zhiqiao Dong and Chenhui Shao}, year = {2025}, doi = {10.1016/j.jmapro.2026.03.051}, url = {https://arxiv.org/abs/2510.15075}, note = {Source identifier: 2510.15075} }