TY  - RPRT
TI  - Physics-informed data-driven machine health monitoring for two-photon lithography
AU  - Sixian Jia
AU  - Zhiqiao Dong
AU  - Chenhui Shao
PY  - 2025
DO  - 10.1016/j.jmapro.2026.03.051
UR  - https://arxiv.org/abs/2510.15075
ID  - 2510.15075
ER  -