@misc{indiciaef6c4c9a8f0af, title = {Wafer-Scale All-Dielectric quasi-BIC Metasurfaces: Bridging High-throughput Deep-UV Lithography with Nanophotonic Applications}, author = {Aidana Beisenova and Wihan Adi and Wenxin Wu and Shovasis K Biswas and Samir Rosas and Biljana Stamenic and Demis D. John and Filiz Yesilkoy}, year = {2025}, url = {https://arxiv.org/abs/2510.15135}, note = {Source identifier: 2510.15135} }