@misc{indiciae92bea3c09314,
  title = {Surface diffusion of phosphorus on Si(100) after PBr3 adsorption},
  author = {T. V. Pavlova and V. M. Shevlyuga},
  year = {2025},
  doi = {10.1039/d5cp03294f},
  url = {https://arxiv.org/abs/2510.15599},
  note = {Source identifier: 2510.15599}
}