TY - RPRT TI - Surface diffusion of phosphorus on Si(100) after PBr3 adsorption AU - T. V. Pavlova AU - V. M. Shevlyuga PY - 2025 DO - 10.1039/d5cp03294f UR - https://arxiv.org/abs/2510.15599 ID - 2510.15599 ER -